Barriers to the diffusion of silicon and carbon adatoms on an ideal (non-reconstructed) Si(111) surface, and at silicon carbide clusters of various sizes occurring on this surface, were determined using molecular dynamics simulations with a many-body Tersoff potential.

Molecular Dynamics Study of the Diffusion Barriers for Silicon and Carbon Adatoms on a Si(111) Surface. Kharlamov, V.S., Lubov, M.N., Zhurkin, E.E., Trushin, Y.V.: Technical Physics Letters, 2006, 32[8], 687-90