The diffusion of light atoms such as hydrogen, lithium, and boron into the diamond crystal was analyzed. The interaction of the incorporated impurities with the native defects or dopants modified their diffusion profile and the electrical properties of the diamond. Forced diffusion under an electrical field was proved to be a useful technique to enhance the diffusion of atoms that could be ionized at mild temperatures and to determine the charge state of the diffusing specie. The results showed that lithium introduced into monocrystalline diamond from an external source diffuses weakly.

Diffusion of Light Elements in Diamond. Saguy, C.: Defect and Diffusion Forum, 2004, 226-228[1], 31-48