Diffusion of oxygen atoms into diamond could be introduced by CrO3 treatment followed by an exposure to hydrogen plasma. From characterization using Rutherford back-scattering spectrometry, it was found that the depth distribution of the doped oxygen in the diamond was homogeneous from the surface where its concentration was about 1020atoms/cm3. The doped oxygen could form cathodoluminescence centers yielding luminescence peaks at 3.75 and 4.64eV at room temperature. After the diffusion of oxygen atoms, damages in the diamond could not be detected by Raman scattering spectroscopy.

Oxygen Diffusion into Diamond Induced by Hydrogen Microwave Plasma. Mori, Y., Eimori, N., Kozuka, H., Yokota, Y., Moon, J., Ma, J.S., Ito, T., Hiraki, A.: Applied Physics Letters, 1992, 60[1], 47-9