The serial sectioning technique was used to study the diffusion of 14C in P-doped n-type crystals with a dislocation density of 5 x 104/cm2. It was found that the results for 950 to 1100C could be described by:

D (cm2/s) = 3.32 x 100 exp[-2.94(eV)/kT]

P.L.Gruzin, S.V.Zemsky, A.D.Bulkin, N.M.Makarov: Fizika i Tekhnika Poluprovodnikov, 1973, 7[9], 1853-5