Radiotracer and serial sectioning techniques were used to study the diffusion of 57Co in p-type B-doped wafers. The results could be described by:

D (cm2/s) = 9.2 x 104 exp[-2.8(eV)/kT]

H.Kitagawa, K.Hashimoto: Japanese Journal of Applied Physics, 1977, 16[1], 173-4