The diffusion kinetics were studied, at 220 to 270K, by analyzing the photo-induced dissociation of an etchant-generated D-C complex. Under suitably strong illumination, the annihilation rate of the complex was proportional to the P density. This indicated that the rate-determining step was the diffusion of D to P atoms. By invoking diffusion-controlled reaction theory, it was deduced that the diffusion was described by:

D (cm2/s) = 5.0 x 10-3 exp[-0.49(eV)/kT]

Y.Kamiura, M.Yoneta, F.Hashimoto: Applied Physics Letters, 1991, 59[24], 3165-7