Silver implantation (75keV, 2 x 1014ions/cm2) into ZnO ceramics was carried out at room temperature in order to characterize the diffusion. Annealing caused Ag evaporation from the sample. Results suggested that it was difficult to incorporate Ag into Zn site by annealing. An Ag profile with a monotonic decrease in concentration below 3 x 1017/cm3 was observed in ZnO annealed at 900C. The above became the basic result for producing a ZnO sensor using the reaction at the surface and grain boundary.

Ion Implantation and Diffusion Behavior of Silver in Zinc Oxide. Sakaguchi, I., Watanabe, K., Ohgaki, T., Nakagawa, T., Hishita, S., Adachi, Y., Ohashi, N., Haneda, H.: Journal of the Ceramic Society of Japan, 2010, 118[1375], 217-9