Aluminum-doped zinc oxide ceramics were used to study oxygen self-diffusion by the vapor–solid exchange method. The diffusion profile and the quantitative analysis of impurities (H, Li, Al) were performed by secondary ion mass spectrometry. The concentrations of Al and H in ZnO were evaluated to be 3.2 x 1019 and below 1.5 x 1017/cm3, respectively. The simultaneous diffusion of oxygen tracer and Li impurity were detected in the analysis, and the diffusion profiles were analyzed to evaluate the diffusion coefficients. Enhanced oxygen diffusivity and increased Li impurity concentration was obtained in Al-doped ZnO. Defect equations for enhancing oxygen diffusivity, and increasing Li concentration, in Al-doped ZnO were considered.

Simultaneous Diffusion of Oxygen Tracer and Lithium Impurity in Aluminum Doped Zinc Oxide. Sakaguchi, I., Watanabe, K., Adachi, Y., Ohgaki, T., Hishita, S., Ohashi, N., Haneda, H.: Japanese Journal of Applied Physics, 2011, 50[12], 125501