ZnO/CuO and ZnO/ZnO CuO/CuO multilayered films were deposited on Pyrex substrates at <100C by ion-beam sputtering. The preferred orientation and interdiffusion of these films were examined for films with varying layer repeat lengths (pari thickness). X-ray diffraction analysis showed a preferred ZnO (002) orientation parallel to the surface in annealed ZnO layers of ≈1 to ≈3nm thickness; no peak was observed for films with a layer repeat length smaller than 1.1nm. The degree of preferred orientation reduced with increasing layer thickness in ZnO/CuO films and with increasing ZnO CuO thickness in ZnO/ZnO CuO/CuO films. The decay rate of the low-angle X-ray intensity showed that interdiffusivity was largely dependent on the layer repeat length. A smaller layer repeat length gave a larger value of interdiffusivity.

Preferred Orientation and Interdiffusion in Zinc Oxide/Copper Oxide Multilayered Films. Suzuki, T., Yamazaki, T., Kageyama, T., Yata, T.: Journal of Materials Science, 1989, 24[6], 2110-4