The migration of the metal was studied by using deep-level transient spectroscopic techniques, or by determining the diffusion profiles of a deep level within depletion regions. The profiles could be accurately described by solutions to Fick’s equation. The diffusivity near to room temperature was studied by monitoring the pair reaction of the impurity with substitutional B. It was found that the results at 287 to 363K could be described by:

D (cm2/s) = 2.4 x 10-3 exp[-0.72(eV)/kT]

H.Nakashima, K.Hashimoto: Materials Science Forum, 1992, 83-87, 227-32