Secondary ion mass spectroscopic results revealed that the use of spun-on film diffusion could produce very flat Fe profiles whose concentrations of 1015 to 1017/cm3 were consistent with the solubility of Fe at diffusion temperatures of 650 to 900C. The surface accumulation region was far smaller than that which was produced by the use of conventional techniques. It was suggested that there was a relationship between the solubility and the equilibrium concentration of Ga antisite defects.

Iron Concentrations in GaAs Diffused from a Spin-on Film. J.Ohsawa, M.Nakamura, Y.Nekado, M.Migitaka, N.Tsuchida: Japanese Journal of Applied Physics, 1995, 34[2-5B], L600-2