The rapid thermal diffusion of Zn into semi-insulating material, from spun-on silica films, was investigated. Depending upon the heating rate, 2 types of secondary ion mass spectrometry profile were observed.

Rapid Thermal Diffusion of Zinc in GaAs. E.Nowak, G.Kühn, T.Morgenstern, B.Schumann: Crystal Research and Technology, 1991, 26[8], 981-6