The intermixing of multiple quantum well structures by Zn diffusion at 550C was investigated. Secondary ion mass spectroscopy and X-ray analysis revealed that Zn diffusion promoted the intermixing of group-III atoms, but had little effect upon group-V profiles. However, the resultant group-III atom profiles were not completely uniform; even after Zn diffusion. The results suggested that a large lattice mismatch suppressed the Zn diffusion intermixing process.

Zn Diffusion-Induced Intermixing of InGaAs/InP Multiple Quantum Well Structures. K.Nakashima, Y.Kawaguchi, Y.Kawamura, Y.Imamura, H.Asahi: Applied Physics Letters, 1999, 52[17], 1383-5