The Fe redistribution in material annealed without encapsulant was studied by using secondary ion mass spectrometry. In annealed crystals, thin-surface Fe accumulation, followed by Fe depletion, occurred. It was clearly shown that the Fe redistribution resulted from thermally stimulated Fe out-diffusion described by:

D(cm2/s) = 2.5 x 10−4exp[-1.7(eV)/kT]

at 700 to 900C.

Redistribution of Fe in Thermally Annealed Semi‐Insulating InP(Fe): Determination of Fe Diffusion Coefficient in InP. H.Kamada, S.Shinoyama, A.Katsui: Journal of Applied Physics, 1984, 55, 2881