Effusion experiments and secondary ion mass spectrometric profiling were carried out on post-hydrogenated (or deuterated) micro nano-crystallized films that were obtained by the thermal annealing of amorphous sputtered layers. Analysis of the effusion spectra and secondary ion mass spectrometry profiles revealed the existence of cavities that contained molecular H, the presence of weakly-bonded H in small clusters, and of H that was trapped at grain boundaries.

Hydrogen Diffusion and Trapping in Micro-Nanocrystalline Silicon. L.Lusson, P.Elkaim, A.Correia, D.Ballutaud: Journal de Physique III, 1995, 5[8], 1173-84