In the modified radiotracer technique ion beams within a broad energy range were employed. They included energetic light particles ensuring radioactive isotope production via nuclear reactions, keV-ion implantation of radiotracers and sputtering by low energy heavy ions for depth profiling. If the involved ion–solid interactions were properly taken into account, the technique provided an effective means for solid-state diffusion studies under demanding conditions. The various aspects related to the modified radiotracer technique were surveyed. The reliability of the procedure was demonstrated by comparison with corresponding profiles obtained by secondary ion mass spectrometry. Previously unpublished diffusion data for 71Ge self-diffusion in relaxed Si0.87Ge0.13 were provided for comparison purposes. Versatile Use of Ion Beams for Diffusion Studies by the Modified Radiotracer Technique. P.Laitinen, I.Riihimäki, J.Huikari, J.Räisänen: Nuclear Instruments and Methods in Physics Research B, 2004, 219-220, 530-3