Locally Er3+-doped non-congruent Li-deficient Ti:Er:LiNbO3 strip waveguide was fabricated using Li-poor vapor transport equilibration, with Er3+ and Ti4+ diffusion in wet O2. The Li2O content change was deduced from the measured birefringence. The Ti4+ and Er3+ profile characteristics in the waveguide were studied by means of secondary ion mass spectrometry. The results showed that the vapor transport equilibration and subsequent Er3+ diffusion procedures resulted in an ∼0.8mol%Li2O content reduction. The Ti4+ profile was the sum of two error functions in the width direction, and a Gaussian function in the depth direction of the waveguide. The Er3+ profile also resembled a Gaussian function. At 1130C, the Ti4+ surface/depth diffusivity and surface concentration were 8.5/1.98μm2/h and ∼7mol%, respectively, and the Er3+ diffusivity and surface concentrations were 12.8 x 10-2μm2/h and ∼0.6mol%, respectively.

Diffusion Characteristics Study of Locally Er-Doped Noncongruent, Li-Deficient Ti:Er:LiNbO3 Strip Waveguide. D.L.Zhang, B.Chen, P.R.Hua, D.Y.Yu, E.Y.B.Pun: Journal of Materials Research, 2011, 26[23], 2924-30