Specimens were implanted with 30Si, and the resultant profiles were determined by using nuclear reaction techniques. The results were used to estimate the diffusivity at 830 to 1200C. The data could be described by:
D (cm2/s) = 2.0 x 101 exp[-4.4(eV)/kT]
and unambiguously demonstrated that diffusion at lower temperatures was governed by parameters which were substantially smaller than those reported for higher temperatures.
F.J.Demond, S.Kalbitzer, H.Mannsperger, H.Damjantschitsch: Physics Letters A, 1983, 93[9], 503-6
The best linear fits to the solute diffusion data ([124] to [129], [133] to [144], [146] to [176], [188] to [192], [196] to [211], [215] to [223], [234] to [242], [252] to [283], [292] to [298], [306] to [314]) yield:
Al: Ln[Do] = 0.45E – 32.8 (R2 = 0.81); As: Ln[Do] = 0.29E – 23.2 (R2 = 0.87);
Au: Ln[Do] = 0.16E – 12.4 (R2 = 0.16); B: Ln[Do] = 0.29E – 22.6 (R2 = 0.79);
Cu: Ln[Do] = 0.22E (R2 = 0.86); Fe: Ln[Do] = 0.62E – 15.8 (R2 = 0.53);
Ga: Ln[Do] = 0.20E - 16.9 (R2 = 0.78); Ge: Ln[Do] = 0.29E – 23.2.8 (R2 = 0.98);
H: Ln[Do] = 0.17E - 9.9 (R2 = 0.07); Li: Ln[Do] = 0.25E – 9.6 (R2 = 0.48);
Ni: Ln[Do] = 0.29E - 19.4 (R2 = 0.66); O: Ln[Do] = 0.34E – 21.6 (R2 = 0.95);
P: Ln[Do] = 0.35E - 27 (R2 = 0.94); Sb: Ln[Do] = 0.35E – 29.3 (R2 = 0.96);
Si: Ln[Do] = 0.33E - 29 (R2 = 0.86)