The concentration profiles of V, at annealing temperatures of 600 to 1200C, were measured by means of deep-level transient spectroscopy. On the basis of the data, it was found that the diffusivity could be described by:

D (cm2/s) = 9.0 x 10-3 exp[-1.55(eV)/kT]

T.Sadoh, H.Nakashima: Applied Physics Letters, 1991, 58[15], 1653-5