The diffusivity of Cl in vapor-deposited silica layers at 1000 to 2000C was described by:

D (cm2/s) = 2.81 x 10-4 exp[-50.2(kcal/mol)/RT]

These values were not affected by normal F or hydroxyl contents.

J.Kirchhof, S.Unger, K.F.Klein, B.Knappe: Journal of Non-Crystalline Solids, 1995, 181[3], 266-73