The diffusion of D in films was studied, at 485 to 655K, by using a D2 gas-phase permeation technique. The results could be described by:

D (cm2/s) = 1.0 x 10-10 exp[-0.34(eV)/kT]

Grain-boundary diffusion through thin films was suggested to be the rate-limiting process.

R.Checchetto, L.M.Gratton, A.Miotello, C.Tosello: Journal of Non-Crystalline Solids, 1997, 216, 65-70