Empirical relationships were used to relate resistivity data to diffusivity activation energies in thin films. An analysis of resistivity data by means of these equations led to results, for 350 to 450C, which could be described by:

D (cm2/s) = 1.0 x 10-7 exp[-1.06(eV)/kT]

for Au diffusion in Cr. Rutherford back-scattering spectrometry data could be described by:

D (cm2/s) = 7.1 x 10-9 exp[-1.02(eV)/kT]

for Au diffusion in Cr.

P.Madakson: Journal of Applied Physics, 1991, 70[3], 1380-4