The impurity diffusion coefficient of Cu was determined at 1073 to 1163K by means of laser-induced breakdown spectrometry. The grain boundary diffusion coefficient was also calculated using the volume diffusivity and the tails of measured profiles. The activation energies for volume and grain boundary diffusion were approximately 280 and 161kJ/mol, respectively; indicating the possibility of a monovacancy diffusion mechanism in the case of volume diffusion. The results were described by:

D(m2/s) = 2.2 x 10-2exp[-280(kJ/mol)/RT]

sδDgb(m3/s) = 2.6 x 10-11exp[-161(kJ/mol)/RT]

C.G.Lee, J.H.Lee, B.S.Lee, Y.I.Lee, T.Shimozaki, T.Okino: Defect and Diffusion Forum, 2005, 237-240, 266-70