The self-diffusion of implanted 71Ge in relaxed Si0.20Ge0.80 layers was studied at 730 to 950C by using a modified radiotracer technique. The temperature dependence of the diffusion coefficients was found to be described by:

D (m2/s) = 8.1 x 10-3 exp[-3.5(eV)/kT]

P.Laitinen, A.Strohm, J.Huikari, A.Nieminen, T.Voss, C.Grodon, I.Riihimäki, M.Kummer, J.Äystö, P.Dendooven, J.Räisänen, W.Frank, Isolde: Physical Review Letters, 2002, 89[8], 085902