Iron redistribution in InP(Fe) annealed without an encapsulant was studied by using secondary ion mass spectrometry. In annealed crystals, thin surface Fe accumulation followed by Fe depletion occurred. It was clearly shown that the Fe redistribution resulted from thermally stimulated Fe out-diffusion described by:

D(cm2/s) = 2.5 x 10-4 exp[-1.7(eV)/kT]

at 700 to 900C.

H.Kamada, S.Shinoyama, A.Katsui: Journal of Applied Physics, 1984, 55[8], 1984, 2881-4