Liquid-encapsulated Czochralski-grown InP:S samples, annealed for 0.5h in various ambients at 550C, exhibited diffusion fronts which suggested an extremely rapid out-diffusion of S. The Arrhenius plot of the temperature dependence of the diffusion coefficient in vacuum anneals yielded,

D(cm/s) = 4 x 105 exp[-2.16(eV)/kT]

for 350 to 500C. Annealing in vacuum at 450C with various orientations showed that the out-diffusion was nearly orientation-independent, except for an observed absence of diffusion from the <111>-In face.

B.V.Dutt, A.K.Chin, I.Camlibel, W.A.Bonner: Journal of Applied Physics, 1984, 56[6], 1630-5