An investigation was made of diffusion into (111)-type samples by using the spreading resistance technique to determine impurity concentration profiles. It was found that the acceptor exhibited a significantly lower mobility when freed from surface effects. At 1119 to 1390C, the results could be described by:

D (cm2/s) = 1.39 x 100 exp[-3.41(eV)/kT]

R.N.Ghoshtagore: Physical Review B, 1971, 3[8], 2507-14