By using the evacuated closed-tube method, As was diffused from an elemental source at diffusion temperatures of 973 to 1323K. From sheet conductivity results, it was estimated that the diffusivity could be described by:

D (cm2/s) = 9.69 x 102 exp[-4.45(eV)/kT]

S.Ohkawa, Y.Nakajima, Y.Fukukawa: Japanese Journal of Applied Physics, 1975, 14[4], 458-65