Arsenic radiotracer diffusion was studied in intrinsic and in homogeneously doped extrinsic single crystals. Under intrinsic conditions, the tracer diffusion coefficient was described by:

D(cm2/s) = 60 exp[-4.20(eV)/kT]

B.J.Masters, J.M.Fairfield: Journal of Applied Physics, 1969, 40[6], 2390-4