The Au was found to diffuse via a complex mechanism involving a vacancy-controlled interstitial-substitutional equilibrium. This led to very complex diffusion concentration profiles. The experimental data on the self-diffusion coefficient of Si was described by:

D(cm2/s) = 1.81 x 104 exp[-112(kcal/mol)//RT]

The interstitial Au diffusion was described by:

D(cm2/s) = 2.4 x 10-4 exp[-8.9(kcal/mol)/RT]

The substitutional Au diffusion coefficient was described by:

D(cm2/s) = 2.75 x 10-3 exp[-47(kcal/mol)/RT]

W.R.Wilcox, T.J.LaChapelle: Journal of Applied Physics, 1964, 35[1], 240-6