The diffusion of B was studied by using 4-point resistivity measurements. At 700 to 1150C, and for B contents of less than 1018/cm3, the results were described by:

D (cm2/s) = 6.0 x 10-7 exp[-1.68(eV)/kT]

At impurity levels greater than 1018/cm3, the coefficient depended upon the impurity concentration.

G.L.Vick, K.M.Whittle: Journal of the Electrochemical Society, 1969, 116[8], 1142-4