The pairing reaction of interstitial Fe and substitutional B atoms, in Fe-diffused B-doped p-type material, was studied by means of deep-level transient spectroscopy. The diffusivity of Fe at 0 to 72C was found to be described by:

D (cm2/s) = 3.3 x 10-1 exp[-0.81(eV)/kT]

H.Nakashima, T.Isobe, Y.Yamamoto, K.Hashimoto: Japanese Journal of Applied Physics, 1988, 27[8], 1542-3