Profiles in samples which had been diffused with Fe at 800 to 1070C were determined by means of deep-level transient spectroscopy. It was found that the diffusivity of interstitial Fe was described by:

D (cm2/s) = 9.5 x 10-4 exp[-0.65(eV)/kT]

T.Isobe, H.Nakashima, K.Hashimoto: Japanese Journal of Applied Physics, 1989, 28[7], 1282-3