The migration of Fe during low-temperature annealing was studied by using photocapacitance techniques. The resultant depth profiles revealed the occurrence of Fe out-diffusion, but no precipitation in the bulk, at up to 470K. The Fei diffusion data were described by:

D (cm2/s) = 1.0 x 10-2 exp[-0.84(eV)/kT]

T.Heiser, A.Viesli: Physical Review Letters, 1992, 68[7], 978-81