Hydrogen-enhanced thermal donor formation was studied in p-type Czochralski material after exposure to H plasma and post-hydrogenation annealing. The H diffusivities at between 350 and 450C were determined via spreading resistance probe measurements, and were described by:

D(cm2/s) = 1.22 x 102 exp[-1.36(eV)/kT]

The H diffusion was found to be trap-limited.

Y.L.Huang, Y.Ma, R.Job, W.R.Fahrner, E.Simoen, C.Claeys: Journal of Applied Physics, 2005, 98[3], 033511