Rapid thermal donor formation was achieved in plasma-hydrogenated p-type Czochralski material; resulting from the catalytic support of H. A simple method for the indirect determination of the diffusivity of H, by means of spreading resistance probe measurements, was presented. The H diffusion during plasma hydrogenation and post-hydrogenation annealing was investigated. The diffusivity of H at 270 to 450C was described by,

D (cm2/s) = 2.485 x 101 exp[-1.27(eV)/kT]

The diffusion of H was interpreted within the framework of trap-limited diffusion mechanism, where O and H were found to be the main traps.

Y.L.Huang, Y.Ma, R.Job, A.G.Ulyashin: Journal of Applied Physics, 2004, 96[12], 7080-6