The distribution of O in n-type material was determined by using infra-red absorption and radio-activation analysis techniques. It was found that the diffusivity could be described by:

D (cm2/s) = 1.5 x 100 exp[-2.77(eV)/kT]

G.Vakilova, R.F.Vitman, A.A.Lebedev, S.Mukhammedov: Fizika i Tekhnika Poluprovodnikov, 1982, 16[12], 2204-7