By using the formation of a neutral acceptor-hydroxyl complex as a marker, the diffusion of a mobile O species in the p-type material was found to be described by:

D (cm2/s) = 3.0 x 10-10 exp[-0.16(eV)/kT]

At 35C, the diffusivity of the unbound O species was 30 times faster than the effective diffusivity of atomic H under similar conditions.

W.L.Hansen, S.J.Pearton, E.E.Haller: Applied Physics Letters, 1984, 44[9], 889-91