A sensitive method was developed for the measurement of O concentration profiles by using the nuclear reaction, 18O(p,n)18F. By means of this activation technique, O concentrations as low as 1015/cm3 could be determined in a 0.005mm layer. The temperature dependence of the diffusion coefficient was determined at 1000 to 1280C, and was found to be described by:

D (cm2/s) = 2.26 x 100 exp[-3.15(eV)/kT]

J.Gass, H.H.Müller, H.Stussi, S.Schweitzer: Journal of Applied Physics, 1980, 51[4], 2030-7