Samples of undoped Czochralski material were heated at 800 to 1300C in H and quenched. The results showed that the diffusion of O could be described by:

D (cm2/s) = 7.1 x 10-4 exp[-2.0(eV)/kT]

S.A.McQuaid, R.C.Newman, J.H.Tucker, E.C.Lightowlers, R.A.A.Kubiak, M.Golding: Applied Physics Letters, 1991, 58[25], 2933-5