The methods of p-n junction measurement and radioactive tracer analysis were used to study the diffusion of P in single crystals for various impurity surface concentrations. The data could be described by:

D (cm2/s) = 1.0 x 103 exp[-4.29(eV)/kT]

V.A.Uskov, P.V.Pavlov, E.V.Kurilchik, V.I.Pashkov: Fizika Tverdogo Tela, 1970, 12[5], 1504-10