The diffusion of P was studied, using spreading resistance techniques and radiochemical analyses of 32P, under intrinsic conditions. Experiments were carried out in H2 or Ar atmospheres and the matrix used was float-zone, epitaxial and O-doped (111) material. Under intrinsic conditions, the concentration profiles exhibited Fick-type behavior under all surface and bulk concentration conditions. It was found that, at 1130 to 1405C, the intrinsic diffusivities could be described by:

D (cm2/s) = 7.4 x 10-2 exp[-3.30(eV)/kT]

R.N.Ghoshtagore: Physical Review B, 1971, 3[2], 389-96