A closed-tube technique and radiotracer sectioning methods were used to study the diffusion of 32P in intrinsic and extrinsic material. At 950 to 1200C, the P diffusivity could be described by:

intrinsic:     D (cm2/s) = 5.3 x 100 exp[-3.69(eV)/kT]

extrinsic:     D (cm2/s) = 3.9 x 10-1 exp[-3.12(eV)/kT]

The results were explained by assuming that the diffusion process was controlled mainly by monovacancies in the singly negatively charged state.

J.S.Makris, B.J.Masters: Journal of the Electrochemical Society, 1973, 120[9], 1252-5