The diffusivity of P in profiled samples of Stepanov-type material was studied at 1015 to 1200C by using radiotracer, neutron activation and serial sectioning methods. It was found that the results could be described by:

D (cm2/s) = 1.9 x 100 exp[-3.3(eV)/kT]

K.P.Abdurakhmanov, M.B.Zaks, V.V.Kasatkin, G.S.Kulikov, S.K.Persheev, K.K.Khodzhaev: Fizika i Tekhnika Poluprovodnikov, 1988, 22[11], 2088-90. (Soviet Physics-Semiconductors, 1988, 22[11], 1324-5)