Diffusion in monocrystalline intrinsic material was investigated by using a new method which involved the stable isotope, 30Si, and ion-analysis techniques. The diffusivity at 885 to 1175C could be described by:

D (cm2/s) = 1.54 x 102 exp[-4.66(eV)/kT]

L.Kalinowski, R.Seguin: Applied Physics Letters, 1979, 35[3], 211-3