The diffusion of oxygen was measured in TiC0.97 single crystals by using a gas exchange technique in which the amount of stable isotope taken up by the

carbide was controlled by introducing a constant gas volume of oxygen-marked carbon monoxide. Diffusion was extended over depths of 1 to 150μm. The concentration profiles were measured by secondary ion mass spectroscopy The results for 1500 to 2100C were described by:

D(cm2/s) = 0.48 exp[-3.97(eV)/kT]

M.Schuhmacher, P.Eveno: Solid State Ionics, 1984, 12, 263-70