The diffusion of P into thermally grown films from P vapor was investigated using secondary ion mass spectrometry, wet-chemical spectrophotometric measurements and X-ray photo-electron spectroscopy. The diffusion coefficients of P in films at 1273 to 1373K were given by:

D(cm2/s) = 3.79 x 10-9 exp[-221(kJ/mol)/RT]

M.Susa, K.Kawagishi, N.Tanaka, K.Nagata: Journal of the Electrochemical Society, 1997, 144[7], 2552-8