Kinetic lattice Monte Carlo simulations were made of the (100) surface. Taking account of the known anisotropy produced by the surface reconstruction, the diffusion properties of Si ad-dimers and adatoms on the surface were examined. The results revealed a transition from quasi-one-dimensional diffusion to two-dimensional motion as the temperature was raised.

Kinetic Lattice Monte Carlo Simulations of Processes on the Silicon (100) Surface. R.Akis, D.K.Ferry, C.B.Musgrave: Physica E, 2003, 19[1-2], 183-7