A Monte Carlo method for a random walk on a lattice was used to model impurity diffusion in a polycrystalline thin film. This approach permits the modeling of diffusion in films with more than one grain vertically. Numerical results illustrate the effects on the diffused impurity profile of a multiple-grain structure that resembled a brick wall.

Monte Carlo Treatment of Impurity Diffusion in Polycrystalline Films. J.P.Lavine, D.L.Losee: Journal of Applied Physics, 1984, 56[4], 924-6