Deep-level transient spectroscopy showed that the dissociation rate of a D-C complex was about half that of a H-C complex, while the activation energies for the dissociation of both complexes were the same. Isothermal annealing was used to determine the activation energy for the dissociation process of both complexes (1.3eV), with frequency factors of 2 x 1014/s for the H-C complex and 1014/s for the D-C complex. Both complexes had the same electronic level at Ec - 0.15eV. Overall, this proved that both of the complexes had the same atomic configuration, and that their dissociation was governed by atomic jumps of H or D.

Isotope Effects on the Dissociation of a Hydrogen-Carbon Complex in Silicon Y.Kamiura, K.Fukuda, S.Ohyama, Y.Yamashita: Japanese Journal of Applied Physics - 1, 2000, 39[3A], 1098-9